{"id":237,"date":"2025-06-16T15:57:23","date_gmt":"2025-06-16T07:57:23","guid":{"rendered":"https:\/\/www.bihec.com\/university-wafer\/?p=237"},"modified":"2025-06-16T15:57:23","modified_gmt":"2025-06-16T07:57:23","slug":"%e7%be%8e%e5%9b%bd-universitywafer-uv%e3%80%81jgs1%e3%80%81jgs2%e3%80%81jgs3%e7%86%94%e8%9e%8d%e7%9f%b3%e8%8b%b1%e6%99%b6%e5%9c%86","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/university-wafer\/%e7%be%8e%e5%9b%bd-universitywafer-uv%e3%80%81jgs1%e3%80%81jgs2%e3%80%81jgs3%e7%86%94%e8%9e%8d%e7%9f%b3%e8%8b%b1%e6%99%b6%e5%9c%86\/","title":{"rendered":"\u7f8e\u56fd Universitywafer UV\u3001JGS1\u3001JGS2\u3001JGS3\u7194\u878d\u77f3\u82f1\u6676\u5706"},"content":{"rendered":"

\u7f8e\u56fd Universitywafer<\/a> UV\u3001JGS1<\/a>\u3001JGS2\u3001JGS3\u7194\u878d\u77f3\u82f1\u6676\u5706<\/a><\/p>\n

\u7528\u4e8e\u5236\u9020 MEMS<\/a> \u5668\u4ef6\u7684\u4f4e\u5bfc\u70ed\u6027\u7194\u878d\u77f3\u82f1<\/a><\/strong><\/h2>\n

\u4e00\u4f4d\u7814\u7a76\u5fae\u673a\u7535\u7cfb\u7edf<\/strong>\u00a0\uff08MEMS\uff09 \u7684\u535a\u58eb\u8981\u6c42\u4e3a\u4ed6\u4eec\u7684\u9879\u76ee\u63d0\u4f9b\u7194\u878d\u77f3\u82f1\u886c\u5e95\u7684\u62a5\u4ef7\u3002<\/p>\n

\u6211\u4eec\u6b63\u5728\u5c06\u5176\u89c6\u4e3a\u4e00\u4e9b\u9700\u8981\u6784\u5efa\u8584\u819c\u7684\u00a0MEMS \u5668\u4ef6<\/strong>\u7684\u53ef\u80fd\u886c\u5e95\u3002\u6211\u4eec\u901a\u5e38\u4f7f\u7528 Si \u6676\u5706<\/a>\u8fdb\u884c\uff0c\u5e76\u901a\u8fc7\u6676\u5706\u8fdb\u884c\u80cc\u8680\u523b\u3002\u6211\u4eec\u5bf9\u4e8c\u6c27\u5316\u7845<\/a>\u611f\u5174\u8da3\uff0c\u56e0\u4e3a\u5b83\u7684\u5bfc\u70ed\u6027\u4f4e\u3002<\/p>\n

\u7194\u878d\u77f3\u82f1\u6676\u5706\u662f\u9ad8\u7eaf\u5ea6\u4e8c\u6c27\u5316\u7845\u7684\u8584\u7247\uff0c\u7528\u4e8e\u751f\u4ea7\u534a\u5bfc\u4f53\u82af\u7247\u7b49\u7535\u5b50\u8bbe\u5907\u3002\u7194\u878d\u77f3\u82f1\uff0c\u4e5f\u79f0\u4e3a\u7194\u878d\u77f3\u82f1\uff0c<\/strong>\u662f\u4e00\u79cd\u9ad8\u7eaf\u5ea6\u548c\u900f\u660e\u7684\u4e8c\u6c27\u5316\u7845\u5f62\u5f0f\uff0c\u662f\u901a\u8fc7\u5728\u9ad8\u6e29\u4e0b\u7194\u5316\u5929\u7136\u5b58\u5728\u7684\u77f3\u82f1\u7802\u5236\u6210\u7684\u3002\u7194\u878d\u77f3\u82f1\u6676\u7247<\/a><\/strong>\u5177\u6709\u5f88\u5f3a\u7684\u8010\u70ed\u6027\u3001\u8010\u5316\u5b66\u6027\u548c\u8010\u5316\u5b66\u6027\uff0c\u4f7f\u5176\u6210\u4e3a\u7535\u5b50\u8bbe\u5907\u751f\u4ea7\u4e2d\u7684\u7406\u60f3\u57fa\u677f\u6750\u6599\u3002\u7531\u4e8e\u900f\u660e\u5ea6\u9ad8\u3001\u5438\u6536\u5149\u7387\u4f4e\uff0c\u5b83\u4eec\u8fd8\u7528\u4e8e\u751f\u4ea7\u5149\u5b66\u5143\u4ef6\uff0c\u4f8b\u5982\u955c\u5934\u548c\u955c\u5b50\u3002<\/p>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\n

\u76f4\u5f84<\/strong><\/h2>\n<\/td>\n

\n

\u539a \uff08um\uff09<\/strong><\/h2>\n<\/td>\n

\n

\u6ce2\u5170\u8bed<\/strong><\/h2>\n<\/td>\n<\/tr>\n

50.8 \u6beb\u7c73<\/td>\n500 \u5fae\u7c73<\/td>\nDSP<\/a><\/td>\n<\/tr>\n
\n

JGS2 \u7194\u878d\u77f3\u82f1<\/a>\u9876\u90e8 Ra <1nm\uff0c\u80cc\u9762\u7c97\u7cd9\u5ea6 Ra <1nm\uff0cS\/D 40\/20<\/strong><\/h2>\n<\/td>\n<\/tr>\n

50.8 \u6beb\u7c73<\/td>\n100 \u5fae\u7c73<\/td>\nDSP<\/td>\n<\/tr>\n
76.2 \u6beb\u7c73<\/td>\n500 \u5fae\u7c73<\/td>\nDSP<\/td>\n<\/tr>\n
\n

1 \u5e73\u9762 JGS2 \u521d\u7ea7\u5e73\u9762 32.5+\/-2mm\uff0c\u9876\u90e8 Ra <10A\uff0cS\/D 40\/20<\/strong><\/h2>\n<\/td>\n<\/tr>\n

100 \u6beb\u7c73<\/td>\n500 \u5fae\u7c73<\/td>\nDSP<\/td>\n<\/tr>\n
\n

\u673a\u68b0\u7ea7\u7194\u878d\u77f3\u82f1<\/strong><\/h2>\n<\/td>\n<\/tr>\n

100 \u6beb\u7c73<\/td>\n500 \u5fae\u7c73<\/td>\nDSP<\/td>\n<\/tr>\n
100 \u6beb\u7c73<\/td>\n1000 \u5fae\u7c73<\/td>\nDSP<\/td>\n<\/tr>\n
\n

\u7194\u878d\u77f3\u82f1 JGS2 \u7ecf\u8f74 <30um \u5f13 <30um\uff0c TTV <10um\uff0c \u9876\u9762 Ra <1.0nm \u80cc\u9762 Ra <1.0nm\uff0c S\/D 60\/40 \u5e73\u9762\uff1a 32.5+\/-2mm<\/strong><\/h2>\n<\/td>\n<\/tr>\n

100 \u6beb\u7c73<\/td>\n700 \u5fae\u7c73<\/td>\nDSP<\/td>\n<\/tr>\n
100 \u6beb\u7c73<\/td>\n180 \u5fae\u7c73<\/td>\nDSP<\/td>\n<\/tr>\n
\n

\u7194\u878d\u77f3\u82f1\u6676\u5706\uff0cJGS2\uff0cC \u5761\u53e3\uff0c2.50 mm +\/- 0.10 mm<\/strong><\/h2>\n<\/td>\n<\/tr>\n

100 \u6beb\u7c73<\/td>\n2500 \u5fae\u7c73<\/td>\nDSP<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\u7528\u4e8e\u7ea2\u5916 \uff08IR\uff09 \u5e94\u7528\u7684 Corning 7979<\/a> \u7194\u878d\u77f3\u82f1\u6676\u5706<\/strong><\/h2>\n

\u4ee5\u4e0b\u7a97\u53e3\u5df2\u7528\u4e8e\u7814\u7a76\u4eba\u5458\u7684\u7ea2\u5916\u7814\u7a76\u3002<\/p>\n\n\n\n\n\n\n\n\n<\/colgroup>\n\n\n\n\n
\n

\u62a5\u4ef7\u7f16\u53f7<\/h4>\n<\/td>\n

\n

\u76f4\u5f84<\/h4>\n<\/td>\n

\n

\u539a<\/h4>\n<\/td>\n

\n

\u6cb9\u6599<\/h4>\n<\/td>\n

\n

\u54c1\u724c \/\u7b49\u7ea7<\/h4>\n<\/td>\n

\n

\u9876\u90e8 Ra<\/h4>\n<\/td>\n

\n

\u80cc\u9762 Ra<\/h4>\n<\/td>\n<\/tr>\n

U01-W1-T-200812-1<\/td>\n100 +\/-0.2 \u6beb\u7c73<\/td>\n0.5+\/- 0.05 \u6beb\u7c73<\/td>\nDSP<\/td>\nCorning 7979<\/td>\n<0.5\u7eb3\u7c73<\/td>\n<0.5\u7eb3\u7c73<\/td>\n<\/tr>\n
U01-W1-T-200812-2<\/td>\n100 +\/-0.2 \u6beb\u7c73<\/td>\n0.5+\/- 0.05 \u6beb\u7c73<\/td>\nDSP<\/td>\nCorning 7978<\/td>\n<0.5\u7eb3\u7c73<\/td>\n<0.5\u7eb3\u7c73<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/article>\n
Corning 7979<\/a>\nJGS1<\/a>\nJGS2 \u7194\u878d\u77f3\u82f1<\/a>\nUniversitywafer<\/a>\nUniversitywafer\u6676\u5706<\/a>\n\u6676\u5706<\/a>\n\u7194\u878d\u77f3\u82f1<\/a>\n\u7194\u878d\u77f3\u82f1\u6676\u5706<\/a>\n\u7194\u878d\u77f3\u82f1\u6676\u7247<\/a><\/div>","protected":false},"excerpt":{"rendered":"

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